The “Laboratoire de Physique des Interfaces et des Couches Minces” (LPICM) CNRS UMR7647, Ecole Polytechnique is well known worldwide for its expertise in a thin film deposition by plasmaenhanced techniques, as well as in optical characterization of thin films. The lab currently hosts 121 staff members (including 31 tenured researchers). Its research topics include the synthesis of semiconductors dielectric thin films (silicon carbon and organic) and the conception, characterization and modelling of electronic devices. LPICM collaborates with several industrial groups, such as Air Liquide, SaintGobain, PSA, Thales, STMicroeletronics, Samsung and Total. 

Key Facilities

PLATINE platform for nano reliability. ORGATECH platform for device fabrication. CHIMORGA platform for chemistry synthesis and nanomaterial preparation. Full set of characterization equipment: SEM-TEM-AFM-Raman-Polarimetry-Absorption/Fluorescence spectroscopy.


Bérengère Lebental

Jean-Charles Vanel

Yvan Bonnassieux


FP7 Network of Excellence POLYNET (2008-2010). NMP.2012.1.4-1 SMARTONIC (since 2013); ITN ORGBIO (since 2014); H2020 ICT PROTEUS (since 2015).

Relevant Research Publications

Michelis F., Bodelot L., Bonnassieux Y., Lebental B., (2015), “Carbon Highly reproducible, hysteresis-free, flexible strain sensors by inkjet printing of carbon nanotubes”Ghaddab B., Gaudefroy V., Michelis F., Ruiz Hitzky E., Aranda P., Ruiz Gracia C.,Lebental B., (2014), “A novel weigh-in-motion sensor using an asphalt-embedded thin film of graphene-on-clay and carbon nanotubes.